Semiconductor device, method of connecting a semiconductor chip, circuit board, and electronic equipment

ABSTRACT

A semiconductor device comprises: a support member ( 20 ) on which a land ( 24 ) is formed; a semiconductor chip ( 10 ) having a bump for an electrode ( 12 ) that is disposed on the land ( 24 ), and to be bonded face-down to a support member ( 20 ); and resin ( 30 ) which is provided as an adhesive between the semiconductor chip ( 10 ) and the support member ( 20 ), which is allowed to contract on hardening, and which causes pressure-bonding between the land ( 24 ) and the bump ( 12 ) by the stress due to this hardening contraction. The stress therein is partially absorbed by elastic deformation of at least the support member ( 20 ).

TECHNICAL FIELD

[0001] The present invention relates to a semiconductor device, a methodof connecting a semiconductor chip, a circuit board, and electronicequipment.

BACKGROUND OF ART

[0002] Known methods of connecting a semiconductor chip utilize thehardening contraction of a resin. In a method disclosed in JapanesePatent Application Laid-Open No. 1-226161, for example, a semiconductorchip is disposed on a substrate, resin is injected therebetween, and anelectrical connection between an electrode of the semiconductor chip anda circuit pattern on the substrate is created by the hardeningcontraction of the resin. This enables electrical connections by asimple process.

[0003] However, stress in the resin that has hardened on contraction andreaction force of the same order of magnitude are applied to theboundary surfaces between the semiconductor chip, the substrate, and theresin, so that releasing can easily occur. If releasing occurs, themaintaining force thereof becomes insufficient and it is no longerpossible to ensure an electrical connection.

DISCLOSURE OF INVENTION

[0004] The present invention solves the above described problem and hasas an objective thereof the provision of a semiconductor device, amethod of connecting a semiconductor chip, a circuit board, andelectronic equipment that make it possible to preserve electricalconnections and ensure the stablility thereof.

[0005] 1) A semiconductor device in accordance with one aspect of thepresent invention comprises:

[0006] a support member on which is formed an interconnecting patternincluding a land;

[0007] a semiconductor chip to be bonded face-down to the support memberand having a bump for an electrode that is disposed on the land; and

[0008] resin which provides adhesion between the semiconductor chip andthe support member and which contracts on hardening, to cause the landand the bump to be pressure-bonded by stress due to the hardeningcontraction,

[0009] wherein the stress is partially absorbed by elastic deformationof the support member, without changing the shape of the land.

[0010] With this aspect of the invention, the semiconductor chip and thesupport member are pulled together by stress generated by the hardeningcontraction of the resin, so that the land and bump are pressure-bond toform an electrical connection. Since the support member deformselastically, the stress generated by the hardening contraction of theresin is partially absorbed thereby. As a result, reaction force isreduced so that force applied to the boundary surfaces between thesemiconductor chip, the support member, and the resin are also reduced,preventing releasing. This improves the reliability of the electricalconnection between the land and the bump, in a stable manner.

[0011] In addition, this aspect of the invention makes it possible tomaintain the shape of the land, enabling a stable electrical connectionwith no modification in the electrical characteristics of the land.

[0012] 2) With this semiconductor device:

[0013] the support member may comprise a substrate and an adhesive whichbonds the interconnecting pattern to the substrate and which alsodeforms elastically.

[0014] Since the adhesive deforms elastically, this ensures that thestress is partially absorbed thereby.

[0015] 3) With this semiconductor device:

[0016] the relationship between the elastic modulus E_(M) of the resinand the elastic modulus E_(A) of the adhesive may be such that:

E_(M)>E_(A).

[0017] In other words, the adhesive is easier to deform elastically thanthe resin, so that the stress may be absorbed partially by the adhesive.

[0018] 4) With this semiconductor device:

[0019] the support member may be a substrate on which theinterconnecting pattern is formed directly and which has deformedelastically.

[0020] Since the substrate deforms elastically, this ensures that thestress is partially absorbed thereby.

[0021] 5) With this semiconductor device:

[0022] the relationship between the elastic modulus E_(M) of the resinand the elastic modulus E_(S) of the substrate may be such that:

E_(M)>E_(S).

[0023] In other words, the substrate is easier to deform elasticallythan the resin, encouraging stress absorption by the substrate.

[0024] 6) A semiconductor device in accordance with another aspect ofthe present invention comprises:

[0025] a substrate on which is formed an interconnecting patternincluding a land, with an adhesive therebetween;

[0026] a semiconductor chip to be bonded face-down to the substrate andhaving a bump for an electrode that is disposed on the land; and

[0027] resin which provides adhesion between the semiconductor chip andthe substrate and which contracts on hardening, to cause the land andthe bump to be pressure-bonded by stress due to the hardeningcontraction,

[0028] wherein the relationship between the elastic modulus E_(M) of theresin and the elastic modulus E_(A) of the adhesive is such that:

E_(M)>E_(A)

[0029] and the stress is partially absorbed by elastic deformation of atleast the adhesive.

[0030] With this aspect of the invention, the semiconductor chip and thesubstrate are pulled together by the stress generated by the hardeningcontraction of the resin, causing pressure-bonding of the land and thebump and ensuring an electrical connection therebetween. Since theadhesive deforms elastically, the stress generated by the hardeningcontraction of the resin is partially absorbed thereby. As a result,reaction force is reduced so that force applied to the boundary surfacesbetween the semiconductor chip, the substrate, and the resin are alsoreduced, preventing releasing. This improves the reliability of theelectrical connection between the land and the bump, in a stable manner.

[0031] In addition, the adhesive is easier to deform elastically thanthe resin, encouraging stress absorption by the adhesive.

[0032] 7) A semiconductor device in accordance with still another aspectof the present invention comprises:

[0033] a substrate on which is directly formed an interconnectingpattern including a land;

[0034] a semiconductor chip to be bonded face-down to the substrate andhaving a bump for an electrode that is disposed on the land; and

[0035] resin which provides adhesion between the semiconductor chip andthe substrate and which contracts on hardening, to cause the land andthe bump to be pressure-bonded by stress due to the hardeningcontraction,

[0036] wherein the relationship between the elastic modulus E_(M) of theresin and the elastic modulus E_(S) of the substrate is such that:

E_(M)>E_(S)

[0037] and the stress is partially absorbed by elastic deformation of atleast the substrate.

[0038] With this aspect of the invention, the semiconductor chip and thesubstrate are pulled together by the stress generated by the hardeningcontraction of the resin, causing pressure-bonding of the land and thebump and ensuring an electrical connection therebetween. Since thesubstrate deforms elastically, the stress generated by the hardeningcontraction of the resin is partially absorbed thereby. As a result,reaction force is reduced so that force applied to the boundary surfacesbetween the semiconductor chip, the substrate, and the resin are alsoreduced, preventing releasing. This improves the reliability of theelectrical connection between the land and the bump, in a stable manner.

[0039] In addition, the substrate is easier to deform elastically thanthe resin, encouraging stress absorption by the substrate.

[0040] 8) The present invention also applies to a circuit board on whichis formed an interconnecting pattern including a land, with an adhesivetherebetween,

[0041] wherein a semiconductor chip is bonded face-down to the circuitboard by disposing a bump for an electrode on the land; resin providesadhesion between the semiconductor chip and the circuit board andcontracts on hardening, the land and the bump are pressure-bonded bystress due to the hardening contraction, and the stress is partiallyabsorbed by elastic deformation of the adhesive, without changing theshape of the land.

[0042] With this aspect of the invention, the semiconductor chip and thecircuit board are pulled together by the stress generated by thehardening contraction of the resin, causing pressure-bonding of the landand the bump and ensuring an electrical connection therebetween. Sincethe adhesive deforms elastically, the stress generated by the hardeningcontraction of the resin is partially absorbed thereby. As a result,reaction force is reduced so that force applied to the boundary surfacesbetween the semiconductor chip, the circuit board, and the resin arereduced, preventing releasing. This improves the reliability of theelectrical connection between the land and the bump, in a stable manner.

[0043] In addition, this aspect of the invention makes it possible tomaintain the shape of the land, enabling a stable electrical connectionwith no modification in the electrical characteristics of the land.

[0044] 9) With this circuit board:

[0045] the relationship between the elastic modulus E_(M) of the resinand the elastic modulus E_(A) of the adhesive may be such that:

E_(M)>E_(A).

[0046] In other words, the adhesive is easier to deform elastically thanthe resin, encouraging stress absorption by the adhesive.

[0047] 10) The present invention further applies to a circuit board onwhich is directly formed an interconnecting pattern including a land,

[0048] wherein a semiconductor chip is bonded face-down to the circuitboard by disposing a bump for an electrode on the land, resin providesadhesion between the semiconductor chip and the circuit board andcontracts on hardening, the land and the bump are pressure-bonded bystress due to the hardening contraction, and the stress is partiallyabsorbed by elastic deformation of the circuit board, without changingthe shape of the land.

[0049] With this aspect of the invention, the semiconductor chip and thecircuit board are pulled together by the stress generated by thehardening contraction of the resin, causing pressure-bonding of the landand the bump and ensuring an electrical connection therebetween. Sincethe circuit board deforms elastically, the stress generated by thehardening contraction of the resin is partially absorbed thereby. As aresult, reaction force is reduced so that force applied to the boundarysurfaces between the semiconductor chip, the circuit board, and theresin are reduced, preventing releasing. This improves the reliabilityof the electrical connection between the land and the bump, in a stablemanner.

[0050] In addition, this aspect of the invention makes it possible tomaintain the shape of the land, enabling a stable electrical connectionwith no modification in the electrical characteristics of the land.

[0051] 11) With this circuit board:

[0052] the relationship between the elastic modulus E_(M) of the resinand the elastic modulus E_(S) of the circuit board may be such that:

E_(M)>E_(S).

[0053] In other words, the circuit board is easier to deform elasticallythan the resin, encouraging stress absorption by the circuit board.

[0054] 12) The present invention still further applies to a circuitboard on which is formed an interconnecting pattern including a land,with an adhesive therebetween,

[0055] wherein a semiconductor chip is bonded face-down to the circuitboard by disposing a bump for an electrode on the land, resin providesadhesion between the semiconductor chip and the circuit board andcontracts on hardening, and the land and the bump are pressure-bonded bystress due to the hardening contraction;

[0056] wherein the relationship between the elastic modulus E_(M) of theresin and the elastic modulus E_(A) of the adhesive is such that:

E_(M)>E_(A); and

[0057] wherein the stress is partially absorbed by elastic deformationof at least the adhesive.

[0058] With this aspect of the invention, the semiconductor chip and thecircuit board are pulled together by the stress generated by thehardening contraction of the resin, causing pressure-bonding of the landand the bump and ensuring an electrical connection therebetween. Sincethe adhesive deforms elastically, the stress generated by the hardeningcontraction of the resin is partially absorbed thereby. As a result,reaction force is reduced so that force applied to the boundary surfacesbetween the semiconductor chip, the circuit board, and the resin arereduced, preventing releasing. This improves the reliability of theelectrical connection between the land and the bump, in a stable manner.

[0059] In addition, the adhesive is easier to deform elastically thanthe resin, encouraging stress absorption by the adhesive.

[0060] 13) The present invention yet further applies to a circuit boardon which is directly formed an interconnecting pattern including a land,

[0061] wherein a semiconductor chip is bonded face-down to the circuitboard by disposing a bump for an electrode on the land, resin providesadhesion between the semiconductor chip and the circuit board andcontracts on hardening, and the land and the bump are pressure-bonded bystress due to the hardening contraction;

[0062] wherein the relationship between the elastic modulus E_(M) of theresin and the elastic modulus E_(S) of the circuit board is such that:

E_(M)>E_(S); and

[0063] wherein the stress is partially absorbed by elastic deformationof at least the circuit board.

[0064] With this aspect of the invention, the semiconductor chip and thecircuit board are pulled together by the stress generated by thehardening contraction of the resin, causing pressure-bonding of the landand the bump and ensuring an electrical connection therebetween. Sincethe circuit board deforms elastically, the stress generated by thehardening contraction of the resin is partially absorbed thereby. As aresult, reaction force is reduced so that force applied to the boundarysurfaces between the semiconductor chip, the circuit board, and theresin are reduced, preventing releasing. This improves the reliabilityof the electrical connection between the land and the bump, in a stablemanner.

[0065] In addition, the circuit board is easier to deform elasticallythan the resin, encouraging stress absorption by the circuit board.

[0066] 14) Electronic equipment in accordance with further aspect of thepresent invention has the above described semiconductor device.

[0067] 15) Electronic equipment in accordance with still further aspectof the present invention has the above-described circuit board.

[0068] 16) A method of connecting a semiconductor chip in accordancewith still further aspect of the present invention comprises:

[0069] a step of bonding a semiconductor chip in a face-down manner to asupport member on which is formed an interconnecting pattern including aland, in such a manner that a bump for an electrode is disposed on theland; and

[0070] a step of providing a resin as an adhesive between thesemiconductor chip and the support member, causing the resin to hardenon contraction, and pressure-bonding the land and the bump by stress dueto the hardening contraction,

[0071] wherein the shape of the land is maintained while the supportmember is deformed elastically, to absorb the stress partially.

[0072] With this aspect of the invention, the semiconductor chip and thesupport member are pulled together by the stress generated by thehardening contraction of the resin, causing pressure-bonding of the landand the bump and ensuring an electrical connection therebetween. Sincethe support member deforms elastically, the stress generated by thehardening contraction of the resin is partially absorbed thereby. As aresult, reaction force is reduced and force applied to the boundarysurfaces between the semiconductor chip, the support member, and theresin can be reduced, thus preventing releasing. This improves thereliability of the electrical connection between the land and the bump,in a stable manner.

[0073] In addition, this aspect of the invention makes it possible tomaintain the shape of the land, enabling a stable electrical connectionwith no modification in the electrical characteristics of the land.

[0074] 17) With this method of connecting a semiconductor chip:

[0075] the support member may comprise a substrate and an adhesive whichbonds the interconnecting pattern to the substrate and which alsodeforms elastically; and

[0076] the adhesive may be deformed elastically.

[0077] Since the adhesive deforms elastically, this ensures that thestress is partially absorbed thereby.

[0078] 18) With this method of connecting a semiconductor chip:

[0079] the relationship between the elastic modulus E_(M) of the resinand the elastic modulus E_(A) of the adhesive may be such that:

E_(M)>E_(A).

[0080] In other words, the adhesive is easier to deform elastically thanthe resin, encouraging stress absorption by the adhesive.

[0081] 19) With this method of connecting a semiconductor chip:

[0082] the support member may be a substrate on which theinterconnecting pattern is formed directly; and

[0083] the substrate may be deformed elastically.

[0084] Since the substrate deforms elastically, this ensures that thestress is partially absorbed thereby.

[0085] 20) With this method of connecting a semiconductor chip:

[0086] the relationship between the elastic modulus E_(M) of the resinand the elastic modulus E_(S) of the substrate may be such that:

E_(M)>E_(S).

[0087] In other words, the substrate is easier to deform elasticallythan the resin, encouraging stress absorption by the substrate.

[0088] 21) A method of connecting a semiconductor chip in accordancewith still further aspect of the present invention comprises:

[0089] a step of bonding a semiconductor chip in a face-down manner to asubstrate on which is formed an interconnecting pattern including aland, with an adhesive therebetween, in such a manner that a bump for anelectrode is disposed on the land;

[0090] a step of providing a resin as an adhesive between thesemiconductor chip and the substrate, causing the resin to harden oncontraction, and pressure-bonding the land and the bump by stress due tothe hardening contraction,

[0091] wherein the relationship between the elastic modulus E_(M) of theresin and the elastic modulus E_(A) of the adhesive is such that:

E_(M)>E_(A); and

[0092] wherein at least the adhesive is deformed elastically, to absorbthe stress partially.

[0093] With this aspect of the invention, the semiconductor chip and thesubstrate are pulled together by the stress generated by the hardeningcontraction of the resin, causing pressure-bonding of the land and thebump and ensuring an electrical connection therebetween. Since theadhesive deforms elastically, the stress generated by the hardeningcontraction of the resin is partially absorbed thereby. As a result,reaction force is reduced and force applied to the boundary surfacesbetween the semiconductor chip, the support member, and the resin canalso be reduced, preventing releasing. This improves the reliability ofthe electrical connection between the land and the bump, in a stablemanner.

[0094] In addition, the adhesive is easier to deform elastically thanthe resin, encouraging stress absorption by the adhesive.

[0095] 22) A method of connecting a semiconductor chip in accordancewith yet further aspect of the present invention comprises:

[0096] a step of bonding a semiconductor chip in a face-down manner to asubstrate on which is directly formed an interconnecting patternincluding a land, in such a manner that a bump for an electrode isdisposed on the land; and

[0097] a step of providing a resin as an adhesive between thesemiconductor chip and the substrate, causing the resin to harden oncontraction, and pressure-bonding the land and the bump by stress due tothe hardening contraction,

[0098] wherein the relationship between the elastic modulus E_(M) of theresin and the elastic modulus E_(S) of the substrate is such that:

E_(M)>E_(S); and

[0099] wherein at least the substrate is deformed elastically, to absorbthe stress partially.

[0100] With this aspect of the invention, the semiconductor chip and thesubstrate are pulled together by the stress generated by the hardeningcontraction of the resin, causing pressure-bonding of the land and thebump and ensuring an electrical connection therebetween. Since thesubstrate deforms elastically, the stress generated by the hardeningcontraction of the resin is partially absorbed thereby. As a result,reaction force is reduced and force applied to the boundary surfacesbetween the semiconductor chip, the substrate, and the resin can bereduced, thus preventing releasing. This improves the reliability of theelectrical connection between the land and the bump, in a stable manner.

[0101] In addition, the substrate is easier to deform elastically thanthe resin, encouraging stress absorption by the substrate.

BRIEF DESCRIPTION OF DRAWINGS

[0102]FIGS. 1A to 1D illustrate a method of connecting a semiconductorchip and a connection configuration in accordance with an embodiment towhich the present invention is applied;

[0103]FIG. 2 illustrates a modification on this embodiment of theinvention;

[0104]FIG. 3 illustrates another modification on this embodiment of theinvention;

[0105]FIG. 4 shows a semiconductor device fabricated in accordance withthe present invention;

[0106]FIG. 5 shows electronic equipment having a circuit board orsemiconductor device in accordance with the present invention.

BEST MODE FOR CARRYING OUT THE INVENTION

[0107] Preferred embodiments of the present invention are describedbelow with reference to the accompanying drawings.

[0108] The description first concerns a method of connecting asemiconductor chip in accordance with an embodiment of the presentinvention, with reference to FIGS. 1A to 1D. In this embodiment of theinvention, a semiconductor chip 10 is connected to a support member 20.

[0109] The semiconductor chip 10 has one or more bumps 12, where each ofthese bumps 12 acts as an electrode for electrical connection with thecircuitry within the semiconductor chip 10. Note that these bumps 12 maybe formed of a conductive material such as gold, copper, nickel, orsolder, and may be formed to be spherical-shape or rectangularparallelepiped, provided they protrude from the base surface (activesurface) of the semiconductor chip 10. Bumps 12 of a height on the orderof 5 μm to 500 μm are often used; when they are of gold, they are oftenof a height on the order of 5 μm to 30 μm. Alternatively, these bumpsmay be formed on a land 24 side of an interconnecting pattern 22, andmay be a structure called a bump TAB (BTAB) in which the lands 24 areetched.

[0110] The interconnecting pattern 22 is formed on the support member20. The interconnecting pattern 22 comprises the lands 24 on which thebumps 12 of the semiconductor chip 10 will be mounted. The lands 24 areformed to correspond in number and position with the bumps 12.

[0111] In this application, the support member 20 refers to a member onwhich the interconnecting pattern 22 is formed. The support member 20 inthis embodiment of the invention is an adhesive 26 and a substrate 28,by way of example. The adhesive 26 is interposed between the substrate28 and the interconnecting pattern 22 to form a three-layer substrate.Alternatively, the configuration may be such that a multi-layerstructure formed of a stack of layers of insulating resin andinterconnecting patterns is formed on a substrate, or a plurality ofsubstrates may be superimposed to form a multi-layer substrate. Inaddition to the interconnecting pattern 22 on one surface of thesubstrate 28, another interconnecting pattern may be formed on the othersurface. Note that an example in which the substrate alone acts as asupport member, with no adhesive, will be described later with referenceto FIG. 3.

[0112] The substrate 28 that forms part of the support member 20 is acircuit board in accordance with this embodiment. The substrate 28 maybe formed of either an organic or inorganic material, or it may beformed of a compound structure thereof. An example of the substrate 28formed of an organic material is a flexible substrate made of apolyimide resin. Examples of the substrate 28 formed of an inorganicmaterial include a ceramic substrate and a glass substrate. An exampleof a structure that is a compound of organic and inorganic materials isa glass epoxy substrate. The elastic modulus of the substrate 28 is notspecifically limited in this embodiment, but it is preferably small.Note that the following examples are known as the elastic modulus of thesubstrate 28: Flexible substrate: 60 kg/mm² Glass epoxy substrate: 1,100kg/mm² Ceramic substrate: 350,000 kg/mm²

[0113] In this embodiment of the invention, resin 30 is used to ensurethat face-down bonding structure of the semiconductor chip 10 on thesupport member 20 is maintained. The resin 30 provides adhesion betweenthe semiconductor chip 10 and the support member 20, and the bumps 12and the lands 24 are pressure-bonded together by the stress induced bythe contraction of the resin 30 on hardening, or the thermal contractionthereof (which will be described later), or both the hardeningcontraction and the thermal contraction. It is therefore general to usea light-hardening resin or thermal-hardening resin which contracts onhardening, as the resin 30. In addition, the resin 30 preferably has ahigh adhesive strength with respect to the semiconductor chip 10 and thesupport member 20.

[0114] In this embodiment, the relationship between the elastic modulusE_(A) of at least a part (the adhesive 26) of the support member 20after hardening and the elastic modulus E_(M) of the resin afterhardening is:

E_(M)>E_(A)

[0115] For example:

[0116] E_(M)=150 kg/mm²;

[0117] E_(A)=60 kg/mm²

[0118] In other words, the adhesive 26 is made to be easier than theresin 30 to deform elastically in the direction of thickness of thesemiconductor chip 10 and the substrate 28, in response to internalstress due to the contraction on hardening of the resin 30, or internalstress due to the volumetric contraction generated by the cooling from ahot state of the resin 30 if it is a thermal-hardening resin, orinternal stress due to both hardening contraction and volumetriccontraction.

[0119] In this embodiment of the invention, the semiconductor chip 10 isconnected by using a member of the above described configuration, asdescribed below.

[0120] First of all, the support member 20 on which is formed theinterconnecting pattern 22 is prepared, as shown in FIG. 1A. The supportmember 20 comprises the adhesive 26 and the substrate 28. The bumps 12of the semiconductor chip 10 are then positioned above the lands 24 ofthe interconnecting pattern 22 so that the bumps 12 are disposed on thelands 24, as shown in FIG. 1B.

[0121] The resin 30 is then injected into the space between thesemiconductor chip 10 and the support member 20 (the adhesive 26), asshown in FIG. 1C. The resin 30 is then subjected to hardeningappropriate to the composition thereof, to cause the resin 30 to exhibithardening contraction. Stress generated by the hardening contraction,thermal contraction, or both the hardening contraction and thermalcontraction act to decrease the space between the semiconductor chip 10and the support member 20. As a result, the bumps 12 and the lands 24are pressure bonded to form electrical connections therebetween.Alternatively, the resin 30 may be painted or applied in a liquid formor sheet form on the surface of the semiconductor chip 10 on which theactive elements are formed, or on the support member 20 facing thatsurface. The resin 30 used may also be an anisotropic conductiveadhesive into which is mixed some conductive particles.

[0122] In this embodiment of the invention, the relationship between theelastic modulus E_(A) of the adhesive 26 after hardening and the elasticmodulus E_(M) of the resin 30 after hardening is:

E_(M)>E_(A).

[0123] Thus the adhesive 26 is deformed elastically by the stressgenerated by the hardening contraction of the resin 30, or the thermalcontraction thereof, or both the hardening contraction and the thermalcontraction thereof. The lands 24 sink into the layer formed of theadhesive 26, as shown by way of example in FIG. 1D. In addition, atleast one of the bumps 12, the lands 24, and the substrate 28 may bemade to deform elastically.

[0124] The thus obtained connection configuration makes it possible topartially absorb the stress generated by the hardening contraction ofthe resin 30 and also weaken the force that is generated in oppositedirections in the boundary surfaces between the semiconductor chip, thesupport member 20, and the resin 30, thus making it difficult forreleasing to occur. This also improves the reliability of the electricalconnections between the bumps 12 and the lands 24.

[0125] A modification of the above described embodiment of the inventionis shown in FIG. 2. This modification differs from the above describedembodiment in that lands 34 shown in this figure are larger in plan, orare thinner, or are made of a softer material than the lands 24 of FIG.1A, or the adhesive 26 is made to be softer than the lands 24 of FIG.1A. All other components and methods are similar to those of the abovedescribed embodiment, and thus are denoted by the same referencenumerals.

[0126] In the previously described embodiment of the invention, thelands 24 sink into the layer formed of the adhesive, without deformingsubstantially, as shown in FIG. 1D. In contrast thereto, the lands 34 ofthe example shown in FIG. 2 also deform due to the stress generated bythe hardening contraction of the resin 30, as the adhesive 26 deformselastically for the previously described reasons. Note that it ispreferable that the deformation of the lands 34 is elastic deformation.This configuration makes it possible to achieve the same effects asthose of the above described embodiment of the invention.

[0127] Another modification on the above described embodiment is shownin FIG. 3. In this modification, a support member 48 which does notinclude an adhesive is used. In other words, a conductive film of amaterial such as copper is deposited on the support member 48 by amethod such as sputtering, then this is etched to form aninterconnecting pattern 42 comprising lands 44. In this case, theinterconnecting pattern 42 is formed directly on the support member 48to configure a two-layer substrate with no adhesive therebetween. Therelationship between the elastic modulus E_(S) of the support member 48and the elastic modulus E_(M) of the resin 30 is:

E_(M)>E_(S).

[0128] For example:

[0129] E_(M)=150 kg/mm²;

[0130] E_(S)=60 kg/mm²

[0131] In other words, the support member 48 is easier to deformelastically than the resin 30. This relationship can be achieved if thesupport member 48 is a flexible substrate made of a polyimide resin, byway of example. All other components and methods are similar to those ofthe above described embodiment, and thus are denoted by the samereference numerals.

[0132] In the example shown in FIG. 3, the support member 48, acting asa substrate, deforms elastically due to the stress generated by thehardening contraction of the resin 30. This elastic deformation makes itpossible to partially absorb the stress generated by the hardeningcontraction and/or thermal contraction of the resin 30. In addition, thebumps 12 may also deform elastically. This configuration also makes itpossible to achieve the same effects as those of the above describedembodiments. Note that the support member 48 is shown in a greatlydeformed state in FIG. 3, to make this state clear, but in actualpractice it is considered that this deformation will not be discernibleto the naked eye. In addition, the adhesive surface of the resin 30 withrespect to the support member 48 may be deformed by being warped in abimetal manner. Note that the support member 20 in the three-layersubstrate of FIG. 1D is also thought to deform in accordance with theelastic modulus thereof, when viewed on a microscopic level.

[0133] A further modification of the above described embodiment is shownin FIG. 4. This example relates to the fabrication of a semiconductordevice to which is applied the connection configuration of thesemiconductor chip of the present invention. The semiconductor device isshown in FIG. 4 as a completed product. In this semiconductor device,the semiconductor chip 10 is bonded face-down to a support member 50. Inthis case, the support member 50 comprises an adhesive 56 and asubstrate 58, and an interconnecting pattern 52 is formed thereon. Theinterconnecting pattern 52 comprises lands 52 that are connectedelectrically to external electrodes 60 by conductive members that passthrough the substrate 58. Each of the external electrodes 60 is formedof a solder ball or the like.

[0134] Note that the previously described substrate 28 may also beselected for use as the support member 50. The configuration may be suchthat a multi-layer structure formed of a stack of layers of insulatingresin and interconnecting patterns is formed on the support member 50,or a plurality of substrates may be superimposed to form a multi-layersubstrate. All other components and methods are similar to those of theabove described embodiment of the invention, and thus are denoted by thesame reference numerals.

[0135] In the example shown in FIG. 4 too, the layer formed of theadhesive 56 deforms elastically in such a manner that at least part ofeach of the lands 52 sinks thereinto, so that the stress is partiallyabsorbed. This example also makes it possible to achieve the sameeffects as those of the above described embodiment. Note that at leastone of the bumps 12, the lands 52, and the substrate 58 may be made todeform elastically in this example too.

[0136] The present invention can be applied to a chip scale/size package(CSP) type of semiconductor device, or a face-down type of semiconductordevice in which at least one semiconductor chip is mounted, or a moduleconfiguration thereof. A semiconductor device of face-down type may be achip-on-flex/film (COF) or a chip-on-board (COB) structure, by way ofexample. The present invention can also be applied to a CSPsemiconductor device in which a plurality of semiconductor chips aremounted.

[0137] The semiconductor device shown in FIG. 4 may have the externalelectrodes 60, or part of the substrate 58 may be extended to provideexternal connections therefrom. Part of the substrate 58 may form aconnector lead, connectors may be installed on the substrate 58, or theinterconnecting pattern 52 of the substrate 58 itself may be connectedto other electronic equipment.

[0138] In addition, the configuration may be such that the externalelectrodes 60 are not formed in actuality, but a solder cream isprovided to the motherboard side when the device is mounted on amotherboard is used effectively so that the surface tension of thesolder cream when melted forms external electrodes. Such a semiconductordevice is called a land grid array type of semiconductor device.

[0139] As described above, this embodiment of the invention ensure thatlocal elastic deformation occurs within a structure formed of thesemiconductor chip, bumps, lands, and support member, due to thehardening or thermal contraction force of resin in accordance with theelastic modulus of these components, to ensure that electricalconnections between the bumps and the lands are maintained more stably.

[0140] A notebook-sized personal computer 100, which is an example ofelectronic equipment having a circuit board or semiconductor device towhich the present invention is applied, is shown in FIG. 5.

[0141] Note that a semiconductor chip is used by way of example in thisdescription of the invention, but the present invention may also beapplied to an electronic component for surface mounting that requires alarge number of bumps, similar to that of a semiconductor chip,regardless of whether this is an active component or a passivecomponent. Examples of such electronic components include resistors,capacitors, coils, oscillators, filters, temperature sensors,thermistors, varistors, variable resistors, or fuses, by way of example.

[0142] In addition, a plurality of the semiconductor chips may bemounted in all of the previously described embodiments of the invention.In other words, it is possible to mix a semiconductor chip mounted byone of the previously described mounting methods, together with asemiconductor chip mounted by another mounting method, such as one thatis mounted in a face-down manner, having a bonding portion around thesemiconductor chip, or a semiconductor chip mounted by a wire bondingmethod. Furthermore, electronic components other than thosesemiconductor chips can be mixed with such semiconductor chips, to forma module type of semiconductor device.

1. A semiconductor device comprising: a support member on which isformed an interconnecting pattern including a land; a semiconductor chipto be bonded face-down to the support member and having a bump for anelectrode that is disposed on the land; and resin which providesadhesion between the semiconductor chip and the support member and whichcontracts on hardening, to cause the land and the bump to bepressure-bonded by stress due to the hardening contraction, wherein thestress is partially absorbed by elastic deformation of the supportmember, without changing the shape of the land.
 2. The semiconductordevice as defined by claim 1, wherein the support member comprises asubstrate and an adhesive which bonds the interconnecting pattern to thesubstrate and which also deforms elastically.
 3. The semiconductordevice as defined by claim 2, wherein the relationship between theelastic modulus E_(M) of the resin and the elastic modulus E_(A) of theadhesive is such that: E_(M)>E_(A).
 4. The semiconductor device asdefined by claim 1, wherein the support member is a substrate on whichthe interconnecting pattern is formed directly and which has deformedelastically.
 5. The semiconductor device as defined by claim 4, whereinthe relationship between the elastic modulus E_(M) of the resin and theelastic modulus E_(S) of the substrate is such that: E_(M)>E_(S).
 6. Asemiconductor device comprising: a substrate on which is formed aninterconnecting pattern including a land, with an adhesive therebetween;a semiconductor chip to be bonded face-down to the substrate and havinga bump for an electrode that is disposed on the land; and resin whichprovides adhesion between the semiconductor chip and the substrate andwhich contracts on hardening, to cause the land and the bump to bepressure-bonded by stress due to the hardening contraction, wherein therelationship between the elastic modulus E_(M) of the resin and theelastic modulus E_(A) of the adhesive is such that: E_(M)>E_(A) and thestress is partially absorbed by elastic deformation of at least theadhesive.
 7. A semiconductor device comprising: a substrate on which isdirectly formed an interconnecting pattern including a land; asemiconductor chip to be bonded face-down to the substrate and having abump for an electrode that is disposed on the land; and resin whichprovides adhesion between the semiconductor chip and the substrate andwhich contracts on hardening, to cause the land and the bump to bepressure-bonded by stress due to the hardening contraction, wherein therelationship between the elastic modulus E_(M) of the resin and theelastic modulus E_(S) of the substrate is such that: E_(M)>E_(S) and thestress is partially absorbed by elastic deformation of at least thesubstrate.
 8. A circuit board on which is formed an interconnectingpattern including a land, with an adhesive therebetween, wherein asemiconductor chip is bonded face-down to the circuit board by disposinga bump for an electrode on the land; resin provides adhesion between thesemiconductor chip and the circuit board and contracts on hardening, theland and the bump are pressure-bonded by stress due to the hardeningcontraction, and the stress is partially absorbed by elastic deformationof the adhesive, without changing the shape of the land.
 9. The circuitboard as defined by claim 8, wherein the relationship between theelastic modulus E_(M) of the resin and the elastic modulus E_(A) of theadhesive is such that: E_(M)>E_(A).
 10. A circuit board on which isdirectly formed an interconnecting pattern including a land, wherein asemiconductor chip is bonded face-down to the circuit board by disposinga bump for an electrode on the land, resin provides adhesion between thesemiconductor chip and the circuit board and contracts on hardening, theland and the bump are pressure-bonded by stress due to the hardeningcontraction, and the stress is partially absorbed by elastic deformationof the circuit board, without changing the shape of the land.
 11. Thecircuit board as defined by claim 10, wherein the relationship betweenthe elastic modulus E_(M) of the resin and the elastic modulus E_(S) ofthe circuit board is such that: E_(M)>E_(S).
 12. A circuit board onwhich is formed an interconnecting pattern including a land, with anadhesive therebetween, wherein a semiconductor chip is bonded face-downto the circuit board by disposing a bump for an electrode on the land,resin provides adhesion between the semiconductor chip and the circuitboard and contracts on hardening, and the land and the bump arepressure-bonded by stress due to the hardening contraction; wherein therelationship between the elastic modulus E_(M) of the resin and theelastic modulus E_(A) of the adhesive is such that: E_(M)>E_(A); andwherein the stress is partially absorbed by elastic deformation of atleast the adhesive.
 13. A circuit board on which is directly formed aninterconnecting pattern including a land, wherein a semiconductor chipis bonded face-down to the circuit board by disposing a bump for anelectrode on the land, resin provides adhesion between the semiconductorchip and the circuit board and contracts on hardening, and the land andthe bump are pressure-bonded by stress due to the hardening contraction;wherein the relationship between the elastic modulus E_(M) of the resinand the elastic modulus E_(S) of the circuit board is such that:E_(M)>E_(S); and wherein the stress is partially absorbed by elasticdeformation of at least the circuit board.
 14. Electronic equipmenthaving the semiconductor device as defined by any of claims 1 to
 5. 15.Electronic equipment having the semiconductor device as defined by claim6.
 16. Electronic equipment having the semiconductor device as definedby claim
 7. 17. Electronic equipment having the circuit board as definedby claim 8 or claim
 9. 18. Electronic equipment having the circuit boardas defined by claim 10 or claim
 11. 19. Electronic equipment having thecircuit board as defined by claim
 12. 20. Electronic equipment havingthe circuit board as defined by claim
 13. 21. A method of connecting asemiconductor chip, the method comprising: a step of bonding asemiconductor chip in a face-down manner to a support member on which isformed an interconnecting pattern including a land, in such a mannerthat a bump for an electrode is disposed on the land; and a step ofproviding a resin as an adhesive between the semiconductor chip and thesupport member, causing the resin to harden on contraction, andpressure-bonding the land and the bump by stress due to the hardeningcontraction, wherein the shape of the land is maintained while thesupport member is deformed elastically, to absorb the stress partially.22. The method of connecting a semiconductor chip as defined by claim21, wherein the support member comprises a substrate and an adhesivewhich bonds the interconnecting pattern to the substrate and which alsodeforms elastically; and wherein the adhesive is deformed elastically.23. The method of connecting a semiconductor chip as defined by claim22, wherein the relationship between the elastic modulus E_(M) of theresin and the elastic modulus E_(A) of the adhesive is such that:E_(M)>E_(A).
 24. The method of connecting a semiconductor chip asdefined by claim 21, wherein the support member is a substrate on whichthe interconnecting pattern is formed directly; and wherein thesubstrate is deformed elastically.
 25. The method of connecting asemiconductor chip as defined by claim 24, wherein the relationshipbetween the elastic modulus E_(M) of the resin and the elastic modulusE_(S) of the substrate is such that: E_(M)>E_(S).
 26. A method ofconnecting a semiconductor chip, the method comprising: a step ofbonding a semiconductor chip in a face-down manner to a substrate onwhich is formed an interconnecting pattern including a land, with anadhesive therebetween, in such a manner that a bump for an electrode isdisposed on the land; a step of providing a resin as an adhesive betweenthe semiconductor chip and the substrate, causing the resin to harden oncontraction, and pressure-bonding the land and the bump by stress due tothe hardening contraction, wherein the relationship between the elasticmodulus E_(M) of the resin and the elastic modulus E_(A) of the adhesiveis such that: E_(M)>E_(A); and wherein at least the adhesive is deformedelastically, to absorb the stress partially.
 27. A method of connectinga semiconductor chip, the method comprising: a step of bonding asemiconductor chip in a face-down manner to a substrate on which isdirectly formed an interconnecting pattern including a land, in such amanner that a bump for an electrode is disposed on the land; and a stepof providing a resin as an adhesive between the semiconductor chip andthe substrate, causing the resin to harden on contraction, andpressure-bonding the land and the bump by stress due to the hardeningcontraction, wherein the relationship between the elastic modulus E_(M)of the resin and the elastic modulus E_(S) of the substrate is suchthat: E_(M)>E_(S); and wherein at least the substrate is deformedelastically, to absorb the stress partially.